![]() ![]() It appears that mechanical resonating systems are well adapted to address this need as they obtain information on liquid properties thanks to vibrating parameters. Measuring liquid properties is of great interest for the metrology of various kind of liquids like oil, ink, wine or milk. These systems could also be used in liquid, in order to measure physical properties like mass density and the viscosity of fluids. Micromachined vibrating systems are widely used as mass sensors for various applications. This shows the possibility of using the sensor outside of the calibration range. s which corresponds to our expected values.Oil density is evaluated at 939 kg/m 3 and dynamic viscosity at 43 mPa Measurements performed on oil validate the use of the Lamb system. This Lamb wave resonating sensor can achieve measurement in fairly large viscosity media while keeping a quality factor superior to 90. s viscosity), and 93 for pure glycerol with a viscosity of 985 mPa.The out-of-plane vibrating mode exhibits quality factor of 169, obtained in deionized water (1.22 mPa ![]() s, which is a larger dynamic range compared to existing mechanical resonators showing an upper limit of 700 mPa.The system is calibrated while performing measurements in water glycerol solutions with a density range from 997 to 1264 kg/m 3 and viscosity from 1.22 to 985 mPa The combination of the measured resonance frequency and quality factor enables extraction of density and viscosity of the surrounding liquid. The Lamb mode used for these measurements allows us to infer both the density and viscosity in a larger range as compared to the existing gold-standard techniques of MEMS resonators. This paper reports on a new system for liquid density and viscosity measurement based on a freely suspended rectangular vibrating plate actuated by piezoelectric ceramic (PZT) actuators. ![]()
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